Influence of mechanical noise inside a scanning electron microscope
نویسندگان
چکیده
منابع مشابه
Influence of mechanical noise inside a scanning electron microscope.
The scanning electron microscope is becoming a popular tool to perform tasks that require positioning, manipulation, characterization, and assembly of micro-components. However, some of these applications require a higher level of performance with respect to dynamics and precision of positioning. One limiting factor is the presence of unidentified noises and disturbances. This work aims to stud...
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ژورنال
عنوان ژورنال: Review of Scientific Instruments
سال: 2015
ISSN: 0034-6748,1089-7623
DOI: 10.1063/1.4917557